Pbn heaters and electrostatic chucks

Key Attributes.

Momentives pyrolytic boron nitride (PBN) heaters and electrostatic chucks (e-chucks) combine the unique electrical, chemical, and thermal properties of PBN, a dielectric material, and pyrolytic graphite (PG), an electrical conductor, to produce a truly advanced system. These non-brittle refractory materials owe their exceptional purity to the high-temperature chemical vapor deposition (CVD) production method. The high thermal conductivity and anisotropy of both materials result in excellent thermal uniformity.